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  • 1.
    Sturesson, Peter
    et al.
    Swedish Defence University, Department of Military Studies, Science of Command and Control and Military Technology Division, Military Technology Systems Section. Ångström Space Technology Centre, Dept. of Engineering Sciences, Uppsala University, Sweden; Division of Microsystems Technology, Dept. of Engineering Sciences, Uppsala University, Sweden.
    Klintberg, Lena
    Division of Microsystems, Dept. of Engineering Sciences, Uppsala University.
    Thornell, Greger
    Ångström Space Technology Centre, Dept. of Engineering Sciences, Uppsala University, Sweden; Division of Microsystems Technology, Dept. of Engineering Sciences, Uppsala University, Sweden.
    Pirani Microgauge Fabricated of High-Temperature Co-fired Ceramics with Integrated Platinum Wires2019In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 285, p. 8-16Article in journal (Refereed)
    Abstract [en]

    This paper presents the integration and pressure sensor operation of platinum bond wires in High- Temperature Co-fired alumina (HTCC). Devices were fabricated with a 50 μm diameter wire suspended across a 500 μm wide cavity in green-body state HTCC, electrically connected to screen printed alumina conductors. The substrate shrinkage during sintering to a cavity width of 400 μm causes the wire element to elevate from the cavity ́s bottom surface. Resulting devices were compared with reference devices, containing screen-printed sensor elements, as Pirani gauges operated at 100 °C in constant-resistance mode, and in dynamic mode with a feeding current of 1 A in a pressure range from 10-4 Torr to atmospheric pressure. Also, devices with wire lengths between 500 and 3500 μm were operated and studied in constant-resistance and dynamic mode. Lastly, a device is demonstrated in operation at a mean temperature of 830 °C. The results include wire elements with a consistent elevation from their substrate surfaces, with irregularities along the wires. The wire devices exhibit a faster pressure response in dynamic mode than the reference devices do but operate similarly in constant-resistance mode. Increasing the wire element length shows an increasing dynamic pressure range but a decreasing maximum sensitivity. The sensitivity is retained in high temperature mode, but the dynamic range is extended from about 10 Torr to about 700 Torr.

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