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  • 1.
    Sturesson, Peter
    et al.
    Försvarshögskolan, Militärvetenskapliga institutionen (MVI), Avdelningen för ledningsvetenskap och militärteknik (ALM), Sektionen för militärtekniska system (MteS). Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden.
    Zahra, Khaji
    Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden.
    Lena, Klintberg
    Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden.
    Greger, Thornell
    Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden.
    Ceramic Pressure Sensor for High Temperatures: Investigation of the Effect of Metallization on Read Range2017Inngår i: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 17, nr 8, s. 2411-2421Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    A first realization of membranes by draping a graphite insert with ceramic green body sheets, and a study on the relationship between circuit metallization, made by double- layer screen-printing of platinum and electroplating of silver on top of platinum, and the practical read range of ceramic LC resonators for high-temperature pressure measurements, are presented. As a quality factor reference, two-port microstrip meander devices were positively evaluated. To study interdiffusion between silver and platinum, test samples were annealed at 500, 700, and 900 °C for 4, 36, 72, and 96 hours. The LC resonators were fabricated with both metallization methods, and the practical read range at room temperature was evaluated. Pressure sensitive membranes were characterized for pressures up to 2.5 bar at room temperature, 500 and up to 900°C. Samples electroplated with silver exhibited performance equal to or better than double-layer platinum samples for up to 60 hours at 500°C, 20 hours at 700°C, and for 1 hour at 900°C, which was correlated with the degree of interdiffusion as determined from cross- sectional analysis. The LC resonator samples with double-layer platinum exhibited a read range of 61 mm, and the samples with platinum and silver exhibited a read range of 59 mm. The lowest sheet resistance, and, thereby, the highest read range of 86 mm, was obtained with a silver electroplated LC resonator sample after 36 hours of annealing at 500°C. 

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