Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Ceramic Pressure Sensor for High Temperatures: Investigation of the Effect of Metallization on Read Range
Swedish Defence University, Department of Military Studies, Science of Command and Control and Military Technology Division, Military Technology Systems Section. Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (ÅSTC)ORCID iD: 0000-0002-0501-0887
Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (ÅSTC)
Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (MST)
Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (ÅSTC)
2017 (English)In: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 17, no 8, p. 2411-2421Article in journal (Refereed) Published
Abstract [en]

A first realization of membranes by draping a graphite insert with ceramic green body sheets, and a study on the relationship between circuit metallization, made by double- layer screen-printing of platinum and electroplating of silver on top of platinum, and the practical read range of ceramic LC resonators for high-temperature pressure measurements, are presented. As a quality factor reference, two-port microstrip meander devices were positively evaluated. To study interdiffusion between silver and platinum, test samples were annealed at 500, 700, and 900 °C for 4, 36, 72, and 96 hours. The LC resonators were fabricated with both metallization methods, and the practical read range at room temperature was evaluated. Pressure sensitive membranes were characterized for pressures up to 2.5 bar at room temperature, 500 and up to 900°C. Samples electroplated with silver exhibited performance equal to or better than double-layer platinum samples for up to 60 hours at 500°C, 20 hours at 700°C, and for 1 hour at 900°C, which was correlated with the degree of interdiffusion as determined from cross- sectional analysis. The LC resonator samples with double-layer platinum exhibited a read range of 61 mm, and the samples with platinum and silver exhibited a read range of 59 mm. The lowest sheet resistance, and, thereby, the highest read range of 86 mm, was obtained with a silver electroplated LC resonator sample after 36 hours of annealing at 500°C. 

Place, publisher, year, edition, pages
2017. Vol. 17, no 8, p. 2411-2421
Keyword [en]
Harsh Environments, Wireless Sensor, High Temperatures, Ceramic MEMS
National Category
Aerospace Engineering
Research subject
Militärteknik
Identifiers
URN: urn:nbn:se:fhs:diva-7342DOI: 10.1109/JSEN.2017.2671418ISI: 000398890800016OAI: oai:DiVA.org:fhs-7342DiVA, id: diva2:1190739
Available from: 2018-03-15 Created: 2018-03-15 Last updated: 2018-03-15Bibliographically approved

Open Access in DiVA

fulltext(13044 kB)2 downloads
File information
File name FULLTEXT01.pdfFile size 13044 kBChecksum SHA-512
741410321c5419223582c87263ddb43b14d227b5fbcdaeb669f964c3b699571d1bf62dd0553c9d6d3cf4585876f0c491366511f14016806e5fd2d97db4593ff3
Type fulltextMimetype application/pdf

Other links

Publisher's full text

Authority records BETA

Sturesson, Peter

Search in DiVA

By author/editor
Sturesson, Peter
By organisation
Military Technology Systems Section
In the same journal
IEEE Sensors Journal
Aerospace Engineering

Search outside of DiVA

GoogleGoogle Scholar
Total: 2 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 11 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf