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Manufacturing Miniature Langmuir probes by Fusing Platinum Bond Wires
Uppsala University. (Ångström Space Technology Centre)
Försvarshögskolan, Militärvetenskapliga institutionen (MVI), Militärtekniska avdelningen (MTA). Uppsala University. (Ångström Space Technology Centre)ORCID-id: 0000-0002-0501-0887
Uppsala University. (Ångström Space Technology Centre)
Uppsala University. (Ångström Space Technology Centre)
2015 (engelsk)Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, nr 10, artikkel-id 105012Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

This paper reports on a novel method for manufacturing microscopic Langmuir probes with spherical tips from platinum bond wires by fusing for plasma characterization in microplasma sources. Here, the resulting endpoints, formed by droplets on the ends of a fused wire, are intended to act as spherical Langmuir probes. For studying the fusing behavior, bond wires were wedge bonded over a 2 mm wide slit, to emulate the final application, and fused with different voltages and currents. For electrical isolation, a set of wires were coated with a 4 μm thick layer of Parylene before they were fused. After fusing, the gap size, as well as the shape and area of the ends of the remaining stubs were measured. The yield of the process was also investigated, and the fusing event was studied using a high-speed camera for analyzing its dynamics. Four characteristic tip shapes were observed: spherical, folded, serpentine shaped and semi-spherical. The stub length leveled out at  ~400 μm as the fusing power increased. The fusing of the coated wires required a higher power to yield a spherical shape. Finally, a Parylene coated bond wire was integrated into a stripline split-ring resonator (SSRR) microplasma source, and was fused to form two Langmuir probes with spherical endpoints. These probes were used for measuring the IV characteristics of a plasma generated by the SSRR. In a voltage range between  −60 V and 60 V, the fused stubs exhibited the expected behavior of spherical Langmuir probes, and will be considered for further integration.

sted, utgiver, år, opplag, sider
Bristol: Institute of Physics Publishing (IOPP), 2015. Vol. 25, nr 10, artikkel-id 105012
Emneord [en]
Langmuir probe, bond wire, fusing, microplasma source
HSV kategori
Forskningsprogram
Försvarssystem
Identifikatorer
URN: urn:nbn:se:fhs:diva-5856DOI: 10.1088/0960-1317/25/10/105012ISI: 000366827400028OAI: oai:DiVA.org:fhs-5856DiVA, id: diva2:899615
Forskningsfinansiär
Knut and Alice Wallenberg FoundationSwedish National Space BoardTilgjengelig fra: 2016-02-02 Laget: 2016-02-02 Sist oppdatert: 2019-09-04bibliografisk kontrollert
Inngår i avhandling
1. Sense, Actuate and Survive: Ceramic Microsystems for High-Temperature Aerospace Applications
Åpne denne publikasjonen i ny fane eller vindu >>Sense, Actuate and Survive: Ceramic Microsystems for High-Temperature Aerospace Applications
2018 (engelsk)Doktoravhandling, med artikler (Annet vitenskapelig)
Abstract [en]

In aerospace applications, but also in manufacturing, mining, energy industry and natural hazards, high temperature, corrosion, erosion and radiation, challenge the performance and being of hardware.

In this work, high-temperature co-fired ceramic (HTCC) alumina and platinum have been used for a range of devices intended for aerospace applications at up to 1000°C.

The thermomechanics of a pressure sensor was investigated, and the interfacing was attained by wireless powering and reading. However, read range was limited and sensitivity decreased with temperature. Silver, electroplated after sintering, was found to remedy this until it eventually alloyed with platinum.

Copper was electroplated and oxidized for oxygen storage in a microcombustor, intended for sample preparation for optogalvanic spectroscopy (OGS) to indicate extraterrestrial life. Despite delamination, caused by residual stresses, the device operated successfully.

Conversely, pre-firing metallization by integration of platinum wires was studied. Freely suspended, and despite heat-induced shape irregularities, these were found advantageous over screen printed elements for gas heating, and temperature and pressure sensing. By fusing off the wires, spherical tips, allowing for impedance monitoring of microplasma sources in, e.g., OGS, were formed.

Microplasma sources can also be used for gas heating. This, together with screen printed and suspended resistive heaters, was evaluated in a microthruster, showing that plasma heating is the most effective, implying fuel consumption reduction in satellite propulsion.

In conclusion, HTCC alumina microdevices are thermally stable and could benefit several aerospace applications, especially with the complementary metallization schemes devised here.

Future developments are expected to include both processing and design, all with the intention of sensing, actuating and surviving in high-temperature environments.

sted, utgiver, år, opplag, sider
Uppsala: Acta Universitatis Upsaliensis, 2018. s. 44
Serie
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1696
Emneord
high temperature, ceramics, microsystems, aerospace, sensors, thrusters
HSV kategori
Forskningsprogram
Försvarssystem
Identifikatorer
urn:nbn:se:fhs:diva-8743 (URN)978-91-513-0392-5 (ISBN)
Disputas
2018-09-21, Polhemsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, 09:30 (svensk)
Opponent
Veileder
Tilgjengelig fra: 2019-09-04 Laget: 2019-09-04 Sist oppdatert: 2019-09-04bibliografisk kontrollert

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