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Ceramic Pressure Sensor for High Temperatures: Investigation of the Effect of Metallization on Read Range
Försvarshögskolan, Militärvetenskapliga institutionen (MVI), Avdelningen för ledningsvetenskap och militärteknik (ALM), Sektionen för militärtekniska system (MteS). Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (ÅSTC)ORCID-id: 0000-0002-0501-0887
Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (ÅSTC)
Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (MST)
Uppsala Univ, Dept Engn Sci, Angstrom Space Technol Ctr, Sweden; Uppsala Univ, Dept Engn Sci, Div Microsyst Technol, Sweden. (ÅSTC)
2017 (Engelska)Ingår i: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 17, nr 8, s. 2411-2421Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

A first realization of membranes by draping a graphite insert with ceramic green body sheets, and a study on the relationship between circuit metallization, made by double- layer screen-printing of platinum and electroplating of silver on top of platinum, and the practical read range of ceramic LC resonators for high-temperature pressure measurements, are presented. As a quality factor reference, two-port microstrip meander devices were positively evaluated. To study interdiffusion between silver and platinum, test samples were annealed at 500, 700, and 900 °C for 4, 36, 72, and 96 hours. The LC resonators were fabricated with both metallization methods, and the practical read range at room temperature was evaluated. Pressure sensitive membranes were characterized for pressures up to 2.5 bar at room temperature, 500 and up to 900°C. Samples electroplated with silver exhibited performance equal to or better than double-layer platinum samples for up to 60 hours at 500°C, 20 hours at 700°C, and for 1 hour at 900°C, which was correlated with the degree of interdiffusion as determined from cross- sectional analysis. The LC resonator samples with double-layer platinum exhibited a read range of 61 mm, and the samples with platinum and silver exhibited a read range of 59 mm. The lowest sheet resistance, and, thereby, the highest read range of 86 mm, was obtained with a silver electroplated LC resonator sample after 36 hours of annealing at 500°C. 

Ort, förlag, år, upplaga, sidor
2017. Vol. 17, nr 8, s. 2411-2421
Nyckelord [en]
Harsh Environments, Wireless Sensor, High Temperatures, Ceramic MEMS
Nationell ämneskategori
Rymd- och flygteknik
Forskningsämne
Försvarssystem
Identifikatorer
URN: urn:nbn:se:fhs:diva-7342DOI: 10.1109/JSEN.2017.2671418ISI: 000398890800016OAI: oai:DiVA.org:fhs-7342DiVA, id: diva2:1190739
Tillgänglig från: 2018-03-15 Skapad: 2018-03-15 Senast uppdaterad: 2019-09-04Bibliografiskt granskad
Ingår i avhandling
1. Sense, Actuate and Survive: Ceramic Microsystems for High-Temperature Aerospace Applications
Öppna denna publikation i ny flik eller fönster >>Sense, Actuate and Survive: Ceramic Microsystems for High-Temperature Aerospace Applications
2018 (Engelska)Doktorsavhandling, sammanläggning (Övrigt vetenskapligt)
Abstract [en]

In aerospace applications, but also in manufacturing, mining, energy industry and natural hazards, high temperature, corrosion, erosion and radiation, challenge the performance and being of hardware.

In this work, high-temperature co-fired ceramic (HTCC) alumina and platinum have been used for a range of devices intended for aerospace applications at up to 1000°C.

The thermomechanics of a pressure sensor was investigated, and the interfacing was attained by wireless powering and reading. However, read range was limited and sensitivity decreased with temperature. Silver, electroplated after sintering, was found to remedy this until it eventually alloyed with platinum.

Copper was electroplated and oxidized for oxygen storage in a microcombustor, intended for sample preparation for optogalvanic spectroscopy (OGS) to indicate extraterrestrial life. Despite delamination, caused by residual stresses, the device operated successfully.

Conversely, pre-firing metallization by integration of platinum wires was studied. Freely suspended, and despite heat-induced shape irregularities, these were found advantageous over screen printed elements for gas heating, and temperature and pressure sensing. By fusing off the wires, spherical tips, allowing for impedance monitoring of microplasma sources in, e.g., OGS, were formed.

Microplasma sources can also be used for gas heating. This, together with screen printed and suspended resistive heaters, was evaluated in a microthruster, showing that plasma heating is the most effective, implying fuel consumption reduction in satellite propulsion.

In conclusion, HTCC alumina microdevices are thermally stable and could benefit several aerospace applications, especially with the complementary metallization schemes devised here.

Future developments are expected to include both processing and design, all with the intention of sensing, actuating and surviving in high-temperature environments.

Ort, förlag, år, upplaga, sidor
Uppsala: Acta Universitatis Upsaliensis, 2018. s. 44
Serie
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1696
Nyckelord
high temperature, ceramics, microsystems, aerospace, sensors, thrusters
Nationell ämneskategori
Rymd- och flygteknik Materialteknik
Forskningsämne
Försvarssystem
Identifikatorer
urn:nbn:se:fhs:diva-8743 (URN)978-91-513-0392-5 (ISBN)
Disputation
2018-09-21, Polhemsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, 09:30 (Svenska)
Opponent
Handledare
Tillgänglig från: 2019-09-04 Skapad: 2019-09-04 Senast uppdaterad: 2019-09-04Bibliografiskt granskad

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