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Optical constants and Drude analysis of sputtered zirconium nitride films
Uppsala Universitet.
Uppsala Universitet.
Uppsala Universitet.
Linköpings Tekniska Högskola.
Visa övriga samt affilieringar
1994 (Engelska)Ingår i: Applied Optics, ISSN 0003-6935, E-ISSN 1539-4522, Vol. 33, nr 10, s. 1993-2001Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Opaque and semitransparent dc magnetron-sputtered ZrN films on glass and silicon have been optically characterized with spectral reflectance measurements and ellipsometry. High rate sputtered ZrN has good optical selectivity, i.e., higher than 90% infrared reflectance and a pronounced reflectance step in the visible to a reflectance minimum of less than 10% at 350 nm. The results are comparable with those obtained for single crystalline samples and those prepared by chemical vapor deposition. The complex optical constant (N = n v ik) for opaque films has been determined in the 0.23-25-µm wavelength range with Kramers-Kronig integration of bulk reflectance combined with oblique incidence reflectance for p-polarized light. A variable angle of incidence spectroscopic ellipsometer has been used for determination of the optical constants in the 0.28-1.0-µm wavelength region. The results of the two methods show excellent agreement. The results indicate that ZrN is free electronlike and the Drude model can be applied. The best opaque films had Drude plasma energies (ħω(p) between 6.6 and 7.5 eV and relaxation energies (ħ/τ) between 0.29 and 0.36 eV. Ellipsometer data for the semitransparent films show that the refractive index (n) in the visible increases with decreasing film thickness whereas the extinction coefficient (k) is essentially unchanged. The optical properties are improved by deposition upon a heated substrate.

Ort, förlag, år, upplaga, sidor
1994. Vol. 33, nr 10, s. 1993-2001
Nationell ämneskategori
Materialteknik
Identifikatorer
URN: urn:nbn:se:fhs:diva-4527DOI: 10.1364/AO.33.001993OAI: oai:DiVA.org:fhs-4527DiVA, id: diva2:708497
Tillgänglig från: 2014-03-27 Skapad: 2014-03-27 Senast uppdaterad: 2017-12-05Bibliografiskt granskad
Ingår i avhandling
1. Preparation and Characterisation of Sputtered Titanium- and Zirconium Nitride Optical Films
Öppna denna publikation i ny flik eller fönster >>Preparation and Characterisation of Sputtered Titanium- and Zirconium Nitride Optical Films
1993 (Engelska)Licentiatavhandling, sammanläggning (Övrigt vetenskapligt)
Abstract [en]

Multilayered interference coatings based on titanium- and zirconium nitride and designed for solar control have been prepared using reactive d c magnetron sputtering. Preparation effects and degradation mechanisms were investigated. It was shown that the quality of the nitride strongly depends on the degree of crystallinity in the underlying oxide. It has been shown that the nitride layer partly oxidizes as the top oxide layer is deposited. The degradation is enhanced with temperature. A thin sacrificial layer of aluminium deposited between successive depositions of nitride and oxide is shown to improve the optical performance of the coating as preparedm as well as after accelerated ageing tests.

The optical properties of opaque and semitransparent films of zirconium nitride have been studied. A thorough investigation of the influence of composition, deposition rate, substrate temperature and film thickness on the optical response of the film was performed. Both photometric and ellipsometric methods were used to determine thicknesses and the optical constants at wavelengths ranging from 0.23 to 25 μm. The resulting values of n and k, in the wavelength intervals where these independent methods are applicable, have been shown to agree extremely well. The results so far indicate an even larger potential for zirconium nitride based solar control coatings as compared to the titanium nitride based.

Access to optical constants derived from films of zirconium nitride of variable quality made multilayer modelling a powerful tool in the design and analysis of solar control coatings.

Ort, förlag, år, upplaga, sidor
Uppsala: Uppsala University, 1993. s. 31
Nationell ämneskategori
Atom- och molekylfysik och optik
Identifikatorer
urn:nbn:se:fhs:diva-4530 (URN)
Presentation
, Uppsala
Opponent
Handledare
Tillgänglig från: 2014-04-15 Skapad: 2014-03-27 Senast uppdaterad: 2017-06-14Bibliografiskt granskad

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Förlagets fulltexthttp://ao.osa.org/abstract.cfm?URI=ao-33-10-1993

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