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Pirani Microgauge Fabricated of High-Temperature Co-fired Ceramics with Integrated Platinum Wires
Försvarshögskolan, Militärvetenskapliga institutionen (MVI), Avdelningen för ledningsvetenskap och militärteknik (ALM), Sektionen för militärtekniska system (MteS). Ångström Space Technology Centre, Dept. of Engineering Sciences, Uppsala University, Sweden; Division of Microsystems Technology, Dept. of Engineering Sciences, Uppsala University, Sweden.ORCID-id: 0000-0002-0501-0887
Division of Microsystems, Dept. of Engineering Sciences, Uppsala University.
Ångström Space Technology Centre, Dept. of Engineering Sciences, Uppsala University, Sweden; Division of Microsystems Technology, Dept. of Engineering Sciences, Uppsala University, Sweden.
2019 (engelsk)Inngår i: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 285, s. 8-16Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

This paper presents the integration and pressure sensor operation of platinum bond wires in High- Temperature Co-fired alumina (HTCC). Devices were fabricated with a 50 μm diameter wire suspended across a 500 μm wide cavity in green-body state HTCC, electrically connected to screen printed alumina conductors. The substrate shrinkage during sintering to a cavity width of 400 μm causes the wire element to elevate from the cavity ́s bottom surface. Resulting devices were compared with reference devices, containing screen-printed sensor elements, as Pirani gauges operated at 100 °C in constant-resistance mode, and in dynamic mode with a feeding current of 1 A in a pressure range from 10-4 Torr to atmospheric pressure. Also, devices with wire lengths between 500 and 3500 μm were operated and studied in constant-resistance and dynamic mode. Lastly, a device is demonstrated in operation at a mean temperature of 830 °C. The results include wire elements with a consistent elevation from their substrate surfaces, with irregularities along the wires. The wire devices exhibit a faster pressure response in dynamic mode than the reference devices do but operate similarly in constant-resistance mode. Increasing the wire element length shows an increasing dynamic pressure range but a decreasing maximum sensitivity. The sensitivity is retained in high temperature mode, but the dynamic range is extended from about 10 Torr to about 700 Torr.

sted, utgiver, år, opplag, sider
2019. Vol. 285, s. 8-16
Emneord [en]
HTCC, Pirani gauge, high temperature, bond wires
HSV kategori
Forskningsprogram
Försvarssystem
Identifikatorer
URN: urn:nbn:se:fhs:diva-8165DOI: 10.1016/j.sna.2018.10.008OAI: oai:DiVA.org:fhs-8165DiVA, id: diva2:1248887
Tilgjengelig fra: 2018-09-17 Laget: 2018-09-17 Sist oppdatert: 2019-09-04bibliografisk kontrollert
Inngår i avhandling
1. Sense, Actuate and Survive: Ceramic Microsystems for High-Temperature Aerospace Applications
Åpne denne publikasjonen i ny fane eller vindu >>Sense, Actuate and Survive: Ceramic Microsystems for High-Temperature Aerospace Applications
2018 (engelsk)Doktoravhandling, med artikler (Annet vitenskapelig)
Abstract [en]

In aerospace applications, but also in manufacturing, mining, energy industry and natural hazards, high temperature, corrosion, erosion and radiation, challenge the performance and being of hardware.

In this work, high-temperature co-fired ceramic (HTCC) alumina and platinum have been used for a range of devices intended for aerospace applications at up to 1000°C.

The thermomechanics of a pressure sensor was investigated, and the interfacing was attained by wireless powering and reading. However, read range was limited and sensitivity decreased with temperature. Silver, electroplated after sintering, was found to remedy this until it eventually alloyed with platinum.

Copper was electroplated and oxidized for oxygen storage in a microcombustor, intended for sample preparation for optogalvanic spectroscopy (OGS) to indicate extraterrestrial life. Despite delamination, caused by residual stresses, the device operated successfully.

Conversely, pre-firing metallization by integration of platinum wires was studied. Freely suspended, and despite heat-induced shape irregularities, these were found advantageous over screen printed elements for gas heating, and temperature and pressure sensing. By fusing off the wires, spherical tips, allowing for impedance monitoring of microplasma sources in, e.g., OGS, were formed.

Microplasma sources can also be used for gas heating. This, together with screen printed and suspended resistive heaters, was evaluated in a microthruster, showing that plasma heating is the most effective, implying fuel consumption reduction in satellite propulsion.

In conclusion, HTCC alumina microdevices are thermally stable and could benefit several aerospace applications, especially with the complementary metallization schemes devised here.

Future developments are expected to include both processing and design, all with the intention of sensing, actuating and surviving in high-temperature environments.

sted, utgiver, år, opplag, sider
Uppsala: Acta Universitatis Upsaliensis, 2018. s. 44
Serie
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1696
Emneord
high temperature, ceramics, microsystems, aerospace, sensors, thrusters
HSV kategori
Forskningsprogram
Försvarssystem
Identifikatorer
urn:nbn:se:fhs:diva-8743 (URN)978-91-513-0392-5 (ISBN)
Disputas
2018-09-21, Polhemsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, 09:30 (svensk)
Opponent
Veileder
Tilgjengelig fra: 2019-09-04 Laget: 2019-09-04 Sist oppdatert: 2019-09-04bibliografisk kontrollert

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